Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing

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Bibliographic Information

Title
"Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing"
Statement of Responsibility
edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller
Publisher
  • Electrochemical Society
Publication Year
  • c1988
Book size
23 cm
Other Title
  • Automated integrated circuits manufacturing

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Notes

Includes bibliographical references and indexes

Co-sponsored by: the Electronics and Dielectrics and Insulation Divisions

"... held October 18-23, 1987 in Honolulu, Hawaii" -- on pref

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