Analytical techniques for semiconductor materials and process characterization : proceedings of the satellite symposium to ESSDERC 89 Berlin

Kolbesen, Bernd O., Mc Caughan, Daniel V., Vandervorst, Wilfried, Electrochemical Society. Electronics Division, European Solid State Device Research Conference, Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation

Analytical techniques for semiconductor materials and process characterization : proceedings of the satellite symposium to ESSDERC 89 Berlin

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書誌事項

タイトル: "Analytical techniques for semiconductor materials and process characterization : proceedings of the satellite symposium to ESSDERC 89 Berlin"

責任表示: edited by Bernd O. Kolbesen, Daniel V. Mc Caughan, Wilfried Vandervorst ; [sponsored by the] Electronics Division

出版者

Electrochemical Society

出版年月

c1990

書籍サイズ: 23 cm

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注記

"Papers presented at the Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation, in Berlin, September 15, 1989"--P. iii

Includes bibliographical references and indexes

Analytical techniques for semiconductor materials and process characterization : proceedings of the satellite symposium to ESSDERC 89 Berlin

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Analytical techniques for semiconductor materials and process characterization : proceedings of the satellite symposium to ESSDERC 89 Berlin

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この図書・雑誌をさがす

注記

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