Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

Name: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia
Author: Society of Photo-optical Instrumentation Engineers, Chiao, Jung-Chih, Fraone, Lorenzo, Harrison, H. Barry, Shkel, Andrei M.

Society of Photo-optical Instrumentation Engineers, Chiao, Jung-Chih, Fraone, Lorenzo, Harrison, H. Barry, Shkel, Andrei M.

Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

CiNii 所蔵館 2館

書誌事項

タイトル: "Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia"

責任表示: Jung-Chih Chiao, Lorenzo Fraone, H. Barry Harrison, Andrei M. Shkel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section

出版者

SPIE--the International Society of Optical Engineering

出版年月

c2001

書籍サイズ: 28 cm

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Includes index

Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

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Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

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