Cleaning and surface conditioning technology in semiconductor device manufacturing 10

CiNii 所蔵館 1館

書誌事項

タイトル
"Cleaning and surface conditioning technology in semiconductor device manufacturing 10"
責任表示
editors, T. Hattori, R. E. Novak, J. Ruzyllo ; associate editors, P. Besson, P. Mertens ; sponsoring divisions, Electronics and Photonics
出版者
  • Electrochemical Society
出版年月
  • c2007
書籍サイズ
24 cm.
シリーズ名/番号
  • : CD-ROM
タイトル別名
  • Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing
  • Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10

この図書・雑誌をさがす

注記

"The Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing was held during the Fall Meeting of the Electrochemical Society in Washington, DC in October 2007." -- on pref

Includes bibliographical references and indexes

Title from CD-ROM: Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10

"... have the pleasure of presenting to you, in one CD-ROM, the collection of papers included in all ten Cleaning Symposium proceedings."--on pref. of CD-ROM

関連図書・雑誌

もっと見る

詳細情報 詳細情報について

  • CRID
    1130282269508359552
  • NII書誌ID
    BA84580235
  • ISBN
    9781566775687
    9781566775809
  • 本文言語コード
    en
  • 出版国コード
    us
  • タイトル言語コード
    en
  • 出版地
    • Pennington, NJ
  • データソース種別
    • CiNii Books
ページトップへ