Cleaning and surface conditioning technology in semiconductor device manufacturing 10
CiNii
所蔵館 1館
書誌事項
- タイトル
- "Cleaning and surface conditioning technology in semiconductor device manufacturing 10"
- 責任表示
- editors, T. Hattori, R. E. Novak, J. Ruzyllo ; associate editors, P. Besson, P. Mertens ; sponsoring divisions, Electronics and Photonics
- 出版者
-
- Electrochemical Society
- 出版年月
-
- c2007
- 書籍サイズ
- 24 cm.
- シリーズ名/番号
-
- : CD-ROM
- タイトル別名
-
- Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing
- Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10
この図書・雑誌をさがす
注記
"The Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing was held during the Fall Meeting of the Electrochemical Society in Washington, DC in October 2007." -- on pref
Includes bibliographical references and indexes
Title from CD-ROM: Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10
"... have the pleasure of presenting to you, in one CD-ROM, the collection of papers included in all ten Cleaning Symposium proceedings."--on pref. of CD-ROM
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1130282269508359552
-
- NII書誌ID
- BA84580235
-
- ISBN
- 9781566775687
- 9781566775809
-
- 本文言語コード
- en
-
- 出版国コード
- us
-
- タイトル言語コード
- en
-
- 出版地
-
- Pennington, NJ
-
- データソース種別
-
- CiNii Books
