Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland

Name: Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland
Author: Yallup, Kevin, Narasimhan, Murali K., European Optical Society, Society of Photo-optical Instrumentation Engineers, European Commission. Directorate-General XII, Science, Research, and Development

Yallup, Kevin, Narasimhan, Murali K., European Optical Society, Society of Photo-optical Instrumentation Engineers, European Commission. Directorate-General XII, Science, Research, and Development

Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland

Web Site CiNii 所蔵館 2館

Yallup, Kevin
Narasimhan, Murali K.
European Optical Society
Society of Photo-optical Instrumentation Engineers
European Commission. Directorate-General XII, Science, Research, and Development

書誌事項

タイトル: "Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland"

責任表示: Kevin Yallup, Murali K. Narasimhan, chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise, Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers

出版者

SPIE

出版年月

c1999

書籍サイズ: 28 cm

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Includes bibliographic references and author index

Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland

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Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland

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