Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado

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Bibliographic Information

Title
"Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado"
Statement of Responsibility
John C. Stover, chair/editor
Publisher
  • SPIE-The International Society for Optical Engineering
Publication Year
  • c1996
Book size
28 cm

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Notes

Includes bibliographical references and index

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