Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, Harold Kahn ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c2001
Book size
24 cm
Other Title
  • Materials science of microelectromechanical systems (MEMS) devices 3

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Notes

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130282269789116160
  • NII Book ID
    BA54946961
  • ISBN
    1558995676
  • LCCN
    01044289
  • Web Site
    https://lccn.loc.gov/01044289
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Warrendale, Pa.
  • Data Source
    • CiNii Books
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