Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas

Name: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
Author: Chang, Shih-Chia, Pang, Stella W., Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, United States. National Institute of Standards and Technology

Chang, Shih-Chia, Pang, Stella W., Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, United States. National Institute of Standards and Technology

Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas

Web Site CiNii Available at 2 libraries

Chang, Shih-Chia
Pang, Stella W.
Society of Photo-optical Instrumentation Engineers
Semiconductor Equipment and Materials International
United States. National Institute of Standards and Technology

Bibliographic Information

Title: "Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas"

Statement of Responsibility: Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology

Publisher

SPIE

Publication Year

c1997

Book size: 28 cm

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Notes

Includes bibliographical references and index

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