Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI
Bibliographic Information
- Title
- "Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI"
- Statement of Responsibility
- edited by Wayne Greene, George J. Hefferon, L.K. White . edited by Terry O. Herndon, Andrew L. Wu
- Publisher
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- Electrochemical Society
- Publication Year
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- c1992
- Book size
- 23 cm
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Details 詳細情報について
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- CRID
- 1130282270683172864
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- NII Book ID
- BA14411867
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- ISBN
- 1566770076
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- LCCN
- 92071002
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- Web Site
- https://lccn.loc.gov/92071002
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Data Source
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- CiNii Books