Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI

Name: Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI
Author: International Symposium on Patterning Science and Technology, Greene, Wayne, Hefferon, George J., White, L. K., Herndon, Terry O., Wu, Andrew L., Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division

International Symposium on Patterning Science and Technology, Greene, Wayne, Hefferon, George J., White, L. K., Herndon, Terry O., Wu, Andrew L., Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division

Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI

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International Symposium on Patterning Science and Technology
Greene, Wayne
Hefferon, George J.
White, L. K.
Herndon, Terry O.
Wu, Andrew L.
Electrochemical Society. Dielectric Science and Technology Division
Electrochemical Society. Electronics Division

書誌事項

タイトル: "Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI"

責任表示: edited by Wayne Greene, George J. Hefferon, L.K. White . edited by Terry O. Herndon, Andrew L. Wu

出版者

Electrochemical Society

出版年月

c1992

書籍サイズ: 23 cm

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Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI

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Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI

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