MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA

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Bibliographic Information

Title
"MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA"
Statement of Responsibility
M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]
Publisher
  • SPIE
Publication Year
  • c2001
Book size
28 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130282270765523456
  • NII Book ID
    BA59272005
  • ISBN
    0819442895
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash.
  • Data Source
    • CiNii Books
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