Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas

Name: Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas
Author: Markus, Karen W., Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), Society of Photo-optical Instrumentation Engineers

Markus, Karen W., Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), Society of Photo-optical Instrumentation Engineers

Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas

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Bibliographic Information

Title: "Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas"

Statement of Responsibility: Karen W. Markus, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society of Optical Engineering

Publisher

SPIE

Publication Year

c1995

Book size: 28 cm

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Notes

Includes bibliographical references and index

Related Books

Details 詳細情報について

CRID: 1130282270811459328

NII Book ID: BA30112492

ISBN: 0819420050

LCCN: 95070374

Web Site: https://lccn.loc.gov/95070374

Text Lang: en

Country Code: us

Title Language Code: en

Place of Publication

Bellingham, Wash.

Classification

LCC: TJ1191.5
DC21: 621.3815/2

Subject

LCSH: Micromachining -- Congresses
LCSH: Microfabrication -- Congresses
LCSH: Electromechanical devices -- Design and construction -- Congresses

Data Source

CiNii Books

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