16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

Name: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany
Author: European Conference on Mask Technology for Integrated Circuits and Microcomponents (16th : 1999 : Munich, Germany), Behringer, Uwe, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Forschungszentrum Karlsruhe. Institute for Microstructure Technology, Society of Photo-optical Instrumentation Engineers

European Conference on Mask Technology for Integrated Circuits and Microcomponents (16th : 1999 : Munich, Germany), Behringer, Uwe, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Forschungszentrum Karlsruhe. Institute for Microstructure Technology, Society of Photo-optical Instrumentation Engineers

16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

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書誌事項

タイトル: "16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany"

責任表示: Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) ; cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany)

出版者

SPIE

出版年月

c2000

書籍サイズ: 28 cm

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At head of title: Proceedings

Includes bibliographical references and index

16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

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16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

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