Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

Zwicker, Gerfield, Materials Research Society. Spring Meeting, Advances and Challenges in Chemical Mechanical Planarization

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

CiNii 所蔵館 3館

書誌事項

タイトル: "Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A."

責任表示: editors, Gerfield Zwicker ... [et al.]

出版者

Materials Research Society

出版年月

c2007

書籍サイズ: 24 cm

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注記

"...Symposium C, "Advances and Challenges in Chemical Mechanical Planarization," held April 10-12 at the 2007 MRS Spring Meeting in San Francisco, California."--Pref

Inclueds bibliographical references and indexes

Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

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Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

書誌事項

この図書・雑誌をさがす

注記

関連図書・雑誌

詳細情報 詳細情報について

書き出し

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