Spectroscopic characterization techniques for semiconductor technology : 9-10 November 1983, Cambridge, Massachusetts
Bibliographic Information
- Title
- "Spectroscopic characterization techniques for semiconductor technology : 9-10 November 1983, Cambridge, Massachusetts"
- Statement of Responsibility
- Fred H. Pollak, Robert S. Bauer, chairmen/editors
- Publisher
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- SPIE -- the International Society for Optical Engineering
- Publication Year
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- c1984
- Book size
- 28 cm
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Details 詳細情報について
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- CRID
- 1130282271119977472
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- NII Book ID
- BA23978941
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- ISBN
- 0892524871
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- LCCN
- 83051560
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- Web Site
- https://lccn.loc.gov/83051560
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Data Source
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- CiNii Books