13th Annual Symposium on Photomask Technology and Management : 22-23 September 1993, Santa Clara, California
Bibliographic Information
- Title
- "13th Annual Symposium on Photomask Technology and Management : 22-23 September 1993, Santa Clara, California"
- Statement of Responsibility
- sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
- Publisher
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- SPIE
- Publication Year
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- c1994
- Book size
- 28 cm
- Series Name / No
-
- pbk.
- Other Title
-
- Thirteenth Annual Symposium on Photomask Technology and Management
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Details 詳細情報について
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- CRID
- 1130282271185120384
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- NII Book ID
- BA24472063
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- ISBN
- 0819413569
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- LCCN
- 93086691
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- Web Site
- https://lccn.loc.gov/93086691
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- Text Lang
- en
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- Country Code
- us
-
- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Classification
-
- LCC: TK7874
- DC20: 621.3815/31
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- Subject
-
- Data Source
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- CiNii Books