EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany

Name: EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany
Author: European Conference on Mask Technology for Integrated Circuits and Microcomponents, Behringer, Uwe F. W., VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Institut für Mikrostrukturtechnik, SEMI-Europe, Society of Photo-optical Instrumentation Engineers

European Conference on Mask Technology for Integrated Circuits and Microcomponents, Behringer, Uwe F. W., VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Institut für Mikrostrukturtechnik, SEMI-Europe, Society of Photo-optical Instrumentation Engineers

EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany

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書誌事項

タイトル: "EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany"

責任表示: Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--the Society for Microelectronics, Micro- and Precision Engineering (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.] ; copublished by, SPIE--the International Society for Optical Engineering and VDE Verlag GmbH (Germany)

出版者

SPIE
VDE Verlag GmbH

出版年月

c2005

書籍サイズ: 28 cm

タイトル別名

European Mask and Lithography Conference
European Conference on Mask Technology for Integrated Circuits and Microcomponents
Mask and lithography

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注記

Includes bibliographical references and author index

EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany

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EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany

書誌事項

この図書・雑誌をさがす

注記

関連図書・雑誌

詳細情報 詳細情報について

書き出し

詳細情報詳細情報について