15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany

Web Site CiNii 所蔵館 2館

書誌事項

タイトル: "15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany"

責任表示: Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical Engineering

出版者

出版年月

タイトル別名

Fifteenth European Conference on Mask Technology for Integrated Circuits and Microcomponents
European Conference on Mask Technology for Integrated Circuits and Microcomponents
Mask technology for integrated circuits and microcomponents

Includes bibliographical references and index