Proceedings of the Sixth Symposium on Plasma Processing

Name: Proceedings of the Sixth Symposium on Plasma Processing
Author: Symposium on Plasma Processing, Mathad, G. S., Schwartz, G. C., Gottscho, R. A., Electrochemical Society. Dielectrics and Insulation Division, Electrochemical Society. Electronics Division

Symposium on Plasma Processing, Mathad, G. S., Schwartz, G. C., Gottscho, R. A., Electrochemical Society. Dielectrics and Insulation Division, Electrochemical Society. Electronics Division

Proceedings of the Sixth Symposium on Plasma Processing

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書誌事項

タイトル: "Proceedings of the Sixth Symposium on Plasma Processing"

責任表示: edited by G.S. Mathad, G.C. Schwartz, R.A. Gottscho

出版者

Electrochemical Society

出版年月

c1987

書籍サイズ: 23 cm

タイトル別名

Plasma processing

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注記

Includes bibliographical references and indexes

"... held in San Diego, CA from Oct. 19-24, 1986" -- on pref

Sponsored by: Dielectrics & Insulation and Electronics Divisions

Proceedings of the Sixth Symposium on Plasma Processing

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書き出し

Proceedings of the Sixth Symposium on Plasma Processing

書誌事項

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注記

関連図書・雑誌

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書き出し

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