Silicon nitride, silicon dioxide, and emerging dielectrics 9

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Bibliographic Information

Title
"Silicon nitride, silicon dioxide, and emerging dielectrics 9"
Statement of Responsibility
editors, R. Ekwal Sah ... [et al.]
Publisher
  • Electrochemical Society
Publication Year
  • c2007
Book size
23 cm

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Notes

"... contains the proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics to be held May 6-11, 2007 in Chicago as a part of the 211th Meeting of The Electrochemical Society (ECS)"--on pref.

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Details 詳細情報について

  • CRID
    1130282272487441152
  • NII Book ID
    BA82032137
  • ISBN
    9781566775526
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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