Silicon nitride, silicon dioxide, and emerging dielectrics 9
CiNii
Available at 2 libraries
Bibliographic Information
- Title
- "Silicon nitride, silicon dioxide, and emerging dielectrics 9"
- Statement of Responsibility
- editors, R. Ekwal Sah ... [et al.]
- Publisher
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- Electrochemical Society
- Publication Year
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- c2007
- Book size
- 23 cm
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Notes
"... contains the proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics to be held May 6-11, 2007 in Chicago as a part of the 211th Meeting of The Electrochemical Society (ECS)"--on pref.
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Details 詳細情報について
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- CRID
- 1130282272487441152
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- NII Book ID
- BA82032137
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- ISBN
- 9781566775526
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, N.J.
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- Data Source
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- CiNii Books