Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Web Site CiNii Available at 1 libraries

Bibliographic Information

Title
"Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing"
Statement of Responsibility
edited by Jerzy Ruzyllo, Richard E. Novak ; assistant editors, M. Arienzo ... [et al.] ; [sponsored by the] Electronics and Dielectrics and Insulation divisions
Publisher
  • Electrochemical Society
Publication Year
  • c1990
Book size
23 cm

Search this Book/Journal

Notes

"Held at the Electrochemical Society Fall Meeting in Hollywood, Florida, October 15-20, 1989"--P. iii

Includes bibliographical references and indexes

Related Books

See more

Details 詳細情報について

Back to top