Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
書誌事項
- タイトル
- "Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing"
- 責任表示
- edited by Jerzy Ruzyllo, Richard E. Novak ; assistant editors, M. Arienzo ... [et al.] ; [sponsored by the] Electronics and Dielectrics and Insulation divisions
- 出版者
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- Electrochemical Society
- 出版年月
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- c1990
- 書籍サイズ
- 23 cm
この図書・雑誌をさがす
注記
"Held at the Electrochemical Society Fall Meeting in Hollywood, Florida, October 15-20, 1989"--P. iii
Includes bibliographical references and indexes
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詳細情報 詳細情報について
-
- CRID
- 1130282272516332672
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- NII書誌ID
- BA11868447
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- LCCN
- 90081371
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- Web Site
- https://lccn.loc.gov/90081371
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- 本文言語コード
- en
-
- 出版国コード
- us
-
- タイトル言語コード
- en
-
- 出版地
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- Pennington, NJ (10 South Main St., Pennington 08534-2896)
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- 分類
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- LCC: TK7871.85
- DC20: 621.381/52
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- データソース種別
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- CiNii Books
