Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

Name: Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan
Author: Yoshihara, Hideo, Society of Photo-optical Instrumentation Engineers. Japan Chapter, BACUS (Technical group), Photomask Japan '94

Yoshihara, Hideo, Society of Photo-optical Instrumentation Engineers. Japan Chapter, BACUS (Technical group), Photomask Japan '94

Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

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書誌事項

タイトル: "Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan"

責任表示: Hideo Yoshihara, chair/editor ; sponsored by Japan Chapter of SPIE ; cosponsored by BACUS, SPIE--the International Society for Optical Engineering

出版者

SPIE

出版年月

c1994

書籍サイズ: 28 cm

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注記

"Papers presented at Photomask Japan '94 held at the Kanagawa Science Park in Kawasaki, Japan, on 22 April 1994"--P. ix

Includes bibliographical references and index

Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

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Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

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この図書・雑誌をさがす

注記

関連図書・雑誌

詳細情報 詳細情報について

書き出し

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