Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.

Kumar, Ashok, Higgs, C. Fred, III, Korach, Chad S., Balakumar, Subramanian, Materials Research Society. Spring Meeting

Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.

CiNii 所蔵館 2館

書誌事項

タイトル: "Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A."

責任表示: editors: Ashok Kumar ... [et al.]

出版者

Materials Research Society

出版年月

c2010

書籍サイズ: 24 cm

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注記

Other editors: C. Fred Higgs III, Chad S. Korach, Subramanian Balakumar

Includes bibliographical references and indexes

"..., 'Science and technology of chemical mechanical planarization (CMP),' held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California."--Pref.

Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.

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書き出し

Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.

書誌事項

この図書・雑誌をさがす

注記

関連図書・雑誌

詳細情報 詳細情報について

書き出し

詳細情報詳細情報について