High Purity Silicon VI : proceedings of the sixth International Symposium

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書誌事項

タイトル
"High Purity Silicon VI : proceedings of the sixth International Symposium"
責任表示
editors C.L. Claeys ... [et al.] ; sponsored by the Electrochemical Society, Inc., Electronics Division
出版者
  • Published in cooperation with SPIE-the International Society for Optical Engineering
  • Electrochemical Society, c2000
書籍サイズ
24 cm

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注記

"... held in Phoenix, Arizona at the 198th Meeting of the Electrochemical Society, October 22-27, 2000. The Symposium, sponsored by the Electronics Division of the Electrochemical Society and by SPIE"--on pref

Includes bibliographical references and indexes

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