Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

詳細情報 詳細情報について

• CRID

  1360011144004391808

• DOI

  10.1109/jmems.2014.2353855

• ISSN

  19410158

  10577157

• Web Site

  http://xplorestaging.ieee.org/ielx7/84/7172569/06907988.pdf?arnumber=6907988

• データソース種別

  • Crossref