Elastic modulus and coefficient of thermal expansion of piezoelectric Al<sub>1−x</sub>Sc<sub>x</sub>N (up to x = 0.41) thin films
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- Yuan Lu
- Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
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- Markus Reusch
- Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
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- Nicolas Kurz
- Laboratory for Compound Semiconductor Microsystems, IMTEK—Department of Microsystems Engineering, University of Freiburg, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
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- Anli Ding
- Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
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- Tim Christoph
- Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
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- Mario Prescher
- Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
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- Lutz Kirste
- Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
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- Oliver Ambacher
- Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
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- Agnė Žukauskaitė
- Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
収録刊行物
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- APL Materials
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APL Materials 6 (7), 076105-, 2018-07
AIP Publishing
