Fast modeling of the low-pressure capacitively coupled radio-frequency discharge based on the nonlocal approach
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- S. V. Berezhnoi
- Physical Technical Department, St. Petersburg State Technical University, 195251 Russia, CIS
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- I. D. Kaganovich
- Physical Technical Department, St. Petersburg State Technical University, 195251 Russia, CIS
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- L. D. Tsendin
- Physical Technical Department, St. Petersburg State Technical University, 195251 Russia, CIS
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- V. A. Schweigert
- Institute of Theoretical and Applied Mechanics, 630090 Novosibirsk, Russia, CIS
抄録
<jats:p>The results of modeling a low-pressure capacitively coupled radio-frequency (rf) discharge based on the nonlocal approach are reported. The approximation employed enables fast modeling (FM) of the electron distribution function. The solution of the full problem, which consists of calculation of the electron distribution, rf, and stationary electric fields, and of the plasma density profile, for simple atomic gas takes ∼10 min on the IBM PC 486DX2/66. To check the validity of the FM the full scale Monte Carlo modeling was performed. The results of the fast and the full scale modeling are in agreement.</jats:p>
収録刊行物
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- Applied Physics Letters
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Applied Physics Letters 69 (16), 2341-2343, 1996-10-14
AIP Publishing
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詳細情報 詳細情報について
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- CRID
- 1360294724480999680
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- DOI
- 10.1063/1.117518
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- ISSN
- 10773118
- 00036951
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- データソース種別
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- Crossref