Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques

詳細情報 詳細情報について

• CRID

  1360580933353641216

• DOI

  10.1016/j.mee.2022.111753

• ISSN

  01679317

• Web Site

  https://api.elsevier.com/content/article/PII:S0167931722000478?httpAccept=text/xml

  https://api.elsevier.com/content/article/PII:S0167931722000478?httpAccept=text/plain

• データソース種別

  • Crossref