Low-carrier density sputtered-MoS<inf>2</inf> film by H<inf>2</inf>S annealing for normally-off accumulation-mode FET
収録刊行物
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- 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
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2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM) 222-223, 2017-02
IEEE