A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process
Journal
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- IEEE Electron Device Letters
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IEEE Electron Device Letters 27 (11), 905-907, 2006-11
Institute of Electrical and Electronics Engineers (IEEE)
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Details 詳細情報について
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- CRID
- 1363670318216655744
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- ISSN
- 07413106
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- Data Source
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- Crossref