Integrated MEMS LC Resonator with Sealed Air-Suspended Structure for Single-Chip RF LSIs

K. Kuwabara, N. Sato, H. Morimura, J. Kodate, M. Nakamura, M. Ugajin, T. Kamei, K. Kudou, K. Machida, H. Ishii

doi:10.1109/iedm.2007.4418963

Integrated MEMS LC Resonator with Sealed Air-Suspended Structure for Single-Chip RF LSIs

DOI PDF 被引用文献2件

書誌事項

公開日: 2007

DOI

10.1109/iedm.2007.4418963

公開者: IEEE

説明

This paper describes an integrated MEMS LC resonator that consists of a MEMS inductor and varactor. The resonator features a sealed air-suspended structure: the inductor and varactor are suspended above a CMOS LSI to improve their performance, and they are sealed with a film to protect them during packaging. The quality factor of the inductor is four times higher than that of a CMOS top-layer-metal inductor, and the varactor has a tuning ratio of 100% at about 5-V applied voltage. The resonator is applied to a voltage- controlled oscillator to show its effectiveness for the development of single-chip RF LSIs.