Optical properties of reactively sputtered Ta2O5 films

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  • F. Rubio
    Escuela de Ingenieros Industriales, San Sebastian, Spain
  • J. M. Albella
    Departamento Física Aplicada and Instituto Física Estado Sólido, CSIC, Universidad Autónoma, Madrid-34, Spain
  • J. Denis
    Departamento Física Aplicada and Instituto Física Estado Sólido, CSIC, Universidad Autónoma, Madrid-34, Spain
  • J. M. Martinez-Duart
    Departamento Física Aplicada and Instituto Física Estado Sólido, CSIC, Universidad Autónoma, Madrid-34, Spain

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<jats:p>The optical properties of reactively sputtered Ta2O5 thin films are investigated in the 0.25–2.5 μm wavelength range. The dispersion curves for the refraction and absorption indices are obtained from the reflectance and transmittance spectra. From the absorption data, one electronic transition at 4.07 eV and another about 4.5 eV are obtained. Finally, the optical transitions in Ta2O5 are discussed.</jats:p>

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