Phase Control of Bi2Sr2Can-1CunOy Sputtered Films using He Gas.

DOI Web Site 6 References
  • MATSUMOTO Kosuke
    Department of Electrical and Electronic Engineering, Faculty of Engineering, Tottori University
  • OGURA Mitsuru
    Department of Electrical and Electronic Engineering, Faculty of Engineering, Tottori University
  • KATSURAHARA Koji
    Department of Electrical and Electronic Engineering, Faculty of Engineering, Tottori University
  • KISHIDA Satoru
    Department of Electrical and Electronic Engineering, Faculty of Engineering, Tottori University
  • MIZUTANI Takeshi
    Advanced Materials Laboratory, NIMS
  • YOSHIKAWA Hideki
    Advanced Materials Laboratory, NIMS
  • FUKUSHIMA Sei
    Advanced Materials Laboratory, NIMS
  • TOKUTAKA Heizo
    Department of Electrical and Electronic Engineering, Faculty of Engineering, Tottori University

Bibliographic Information

Other Title
  • Ｈｅガスを用いたＢｉ２Ｓｒ２Ｃａｎ－１ＣｕｎＯｙスパッタ薄膜の組成制御
  • He ガス オ モチイタ Bi2Sr2Can 1CunOy スパッタ ハクマク ノ ソセイ セイギョ

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Abstract

We prepared Bi2Sr2Can-1CunOy (BSCCO) thin films by RF magnetron sputtering using a mixture of He + O2 sputtering gas (He : O2= 4 : 1). As helium gas effectively generates active particles of O2+ and O+ by the Penning ionization effect, the crystallinity of the films is expected to improve.<BR>The crystallinity and the composition of films were dependent on the composition of targets. When we prepared the Bi -2212 films using the targets of Bi : Sr : Ca : Cu = 2 : 2 : 1 : Z (Z = 1.0-3.0), the best crystallinity of the film was obtained using the target of Z = 2.0. Furthermore, we prepared the Bi-2223 films with the composition of target, Bi : Sr : Ca : Cu = 2 : 2 : 2 : 3. The films with dominant Bi-2223 single phase were obtained only at Tsub = 630°C, but Bi-2223 and Bi-2212 mixed phases appeared at the other substrate temperatures.

Journal

  • Shinku

    Shinku 45 (3), 297-300, 2002

    The Vacuum Society of Japan

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