Vacuum Equipment and Application for Thin Film in the Multimedia. Deposition Technique for Capacitor Films with High Dielectric Constant.
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- KAWAHARA Takaaki
- Mitsubishi Electric Corp.
Bibliographic Information
- Other Title
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- マルチメディア時代における真空装置と薄膜応用 高誘電率薄膜成膜技術
- コウ ユウデンリツ ハクマク セイマク ギジュツ
Search this article
Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 48 (11), 1054-1058, 1997
The Surface Finishing Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001204115904640
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- NII Article ID
- 10002260142
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- NII Book ID
- AN1005202X
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- ISSN
- 18843409
- 09151869
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- NDL BIB ID
- 4334591
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
