The Design of MEMS Scanner for the Three Dimensional Actuation with a Pair of Beams

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  • Oguchi Yohei
    Department of Applied Mechanics, Graduate school of Fundamental Science and Engineering, Waseda University
  • Iino Chisa
    Department of Applied Mechanics, Graduate school of Fundamental Science and Engineering, Waseda University
  • Iwase Eiji
    Department of Applied Mechanics, Graduate school of Fundamental Science and Engineering, Waseda University

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  • 1対の支持梁による3次元駆動MEMSスキャナの形状設計
  • 1ツイ ノ シジリョウ ニ ヨル 3ジゲン クドウ MEMS スキャナ ノ ケイジョウ セッケイ

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Abstract

<p>We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.</p>

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