Miniaturized Thermal Analysis Sensor using Micro-heaters on SOI substrate

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  • SOI基板上マイクロヒータを用いた超小型熱分析センサ
  • SOI キバン ジョウ マイクロヒータ オ モチイタ チョウコガタ ネツ ブンセキ センサ

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Miniaturized thermal analysis sensors integrated together with a micro-heater, a sample-holder and a thermocouple on a Si chip have been fabricated using the micro-machining technique. In this paper this thermal analysis sensor is formed on the SOI substrate to set the liquid sample easily on the sample holder. The micro-heater is made of an n type diffusion layer on the diaphragm. New micro-heater characteristic of ΔT-t curve and thermal time constant are measured. Liquid samples of water and methanol are analyzed, and their clear boiling points and evaporation heats are observed.

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