High-output micro-trochoid pump fabricated by a surface treatment technique

DOI Web Site Web Site 参考文献7件

この論文をさがす

説明

We developed a technique that prevents the leakage of the liquid from a channel and applied it to micro-trochoid pump. When a minute texture is formed on the interior wall of a channel and is coated by a low-surface-energy material that is much thinner than the texture, the wettability of the surface can be greatly reduced. This technique is effective in sealing liquid in a channel. And it can seal the water at a pressure difference of 18.1 kPa in a gap of 5 μm. This seal can then be used in high-output micro-trochoid pump.

収録刊行物

参考文献 (7)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ