The Study of Fabrication of the X-ray Mirror by Numerically Controlled Plasma CVM(1st Report)

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  • 数値制御プラズマＣＶＭによるＸ線ミラーの加工に関する研究　（第１報）　　Ｘ線ミラー加工用装置の開発
  • スウチ セイギョ プラズマ CVM ニ ヨル Xセン ミラー ノ カコウ ニ カンスル ケンキュウ ダイ1ポウ Xセン ミラー カコウヨウ ソウチ ノ カイハツ
  • X線ミラー加工用装置の開発

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Abstract

Numerically controlled plasma CVM machine has been developed in order to fabricate the ultra-high accuracy X-ray mirror efficiently without making the deformed layer. In this machine, gas bearing was applied to the rotary electrode for plasma generation and XY-table in order to maintain the cleanliness of the machining atmosphere. As a result of machining the plane mirror made of the silicon for the X-ray using this machine, 22.5nm (p-v) was achieved as flatness.

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