非接触光学式微細形状測定ヘッド（ＨＩＰＯＳＳ‐１）　　超精密測定技術の研究

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書誌事項

タイトル別名
  • High Precision Optical Surface Sensor (HIPOSS-1) - Studies on ultra-precision measuring technology.
  • ヒ セッショク コウガクシキ ビサイ ケイジョウ ソクテイ ヘッド HIPOS
  • Studies on Ultra-precision Measuring Technology
  • 超精密測定技術の研究

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抄録

Although stylus profilometers are now widely used, recent development of single point diamond turning and semiconductor technology strongly require to come out non-contact precise surface sensors. This is mainly because the stylus may scratch the surface of soft metal, thin film, silicon wafer, and so forth. Some non-contact surface measurement methods have been developed. Most of them, however, are complex, expensive, too large, low resolution, or simply hard to handle. Applying the principle of focus detection by critical angle of total reflection, a practical non-contact sensor to measure the surface roughness or the micro-figure of diamond turned metal mirror is developed and named HIPOSS-1 (HIgh Precision Optical Surface Sensor-1). HIPOSS-1 shows 20 nm resolution about vertical direction and is so compact and light weight. And it is interchangeable to a pick-up head of stylus profiling instrument.

収録刊行物

  • 精密工学会誌

    精密工学会誌 52 (12), 2080-2086, 1986

    公益社団法人 精密工学会

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