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Fine processing technology over the theoretical spatial resolution with high photon laser ablation
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- Ishikawa Masazumi
- Kagawa University
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- Ishimaru Itirou
- Kagawa University
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- Ishii Tomohiko
- Kagawa University
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- Inoue Yuusuke
- Kagawa University
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- Okuda Takahiro
- Kagawa University
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- Fujii Yoshiki
- Kagawa University
Bibliographic Information
- Other Title
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- 高フォトンレーザアブレーションによる理論空間解像度を超えた微細加工技術
Description
We study on the fine laser ablation technology that surpasses the theoretical spatial resolution. We focused attention on the ionized-processing using high photon energy. This ionized laser ablation technology dissociates a nucleus directly from interatomic bond. So we used the ArF excimer laser (Wavelength: 193nm) This laser has enough photon energy to cleave an interatomic bond. We sort out a sufficient energy density of laser selectively to do ionized-processing because there is a characteristic of Gaussian distribution in the pencil of laser. In this way, we′ve verified the melting-less laser ablation. We can conduct the process surpassing theoretical spatial resolution by using near-field light with optic fiber.
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2005S (0), 97-97, 2005
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390001205652821888
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- NII Article ID
- 130004657964
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed