High-Speedy Nanometer Positioning Device by the Combination of New Type Linear Motor (Called Tunnel Actuator) and Linear Ball Guideway.

DOI

Bibliographic Information

Other Title
  • 新型リニアモータ・トンネルアクチュエータとリニアボールガイドを組合せた高速ナノ位置決め装置

Description

The new Linear motor called a ″Tunnel Actuator″ possesses some good characteristics, such as no attractive force between the permanet magnet and the armature, and the high level of efficiency because of minimal leakage of magnetic flux in comparison with the conventional linear motor. The purpose of this study is to obtain a high-speedy nanometer level positioning on the ultraprecision positioning device using this new linear motor, in spite of the frictional disturbance of the linear ball guideway. As a result of a step response test and trapezoidal velocity positioning with the maximum speed of 400 mm/s, nanometer level resolution and sub nanometer accuracy (deviation and dispersion) can be obtained by high-speedy PID controller.

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Details 詳細情報について

  • CRID
    1390001205653731456
  • NII Article ID
    130005028669
  • DOI
    10.11522/pscjspe.2007s.0.711.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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