Highly Reliable Piezoelectric Actuator for Precision Stage System

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Abstract

A highly reliable nonresonant ultrasonic motor (NRUSM) made of cylindrical piezoelectric material is proposed in this paper. The high reliability is characterized by long lifetime and no outer gas in the vacuum environment, which are ensured by not using stack adhesives as the source of the gas emission. Positioning and tracking accuracy was better than below ±2 nm. The structural design is discussed in terms of the application to a high-speed high-precision stage system which has stable response to frequent biases without interference from resonant phenomena and the required mechanical strength.

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