Highly Reliable Piezoelectric Actuator for Precision Stage System
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- Hashiguchi Hiroyuki
- Graduate School of Science and Technology, Kumamoto University
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- Egashira Yoshiya
- Kumamoto Technology and Industry Foundation
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- Furukawa Hiroyuki
- Graduate School of Science and Technology, Kumamoto University
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- Endo Taishi
- Graduate School of Science and Technology, Kumamoto University
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- Kosaka Tetsuya
- Kumamoto Technology Incorporated
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- Kosaka Koji
- Graduate School of Science and Technology, Kumamoto University Kumamoto Technology Incorporated
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- Uozumi Kiyohiko
- Aoyama Gakuin University
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- Watanabe Masayuki
- Taiheiyo Cement Corporation
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- Yamakawa Takahiro
- Taiheiyo Cement Corporation
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- Miyata Noboru
- Taiheiyo Cement Corporation
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- Nakada Akira
- Graduate School of Science and Technology, Kumamoto University
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- Kubota Hiroshi
- Graduate School of Science and Technology, Kumamoto University
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- Ohmi Tadahiro
- Tohoku University
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抄録
A highly reliable nonresonant ultrasonic motor (NRUSM) made of cylindrical piezoelectric material is proposed in this paper. The high reliability is characterized by long lifetime and no outer gas in the vacuum environment, which are ensured by not using stack adhesives as the source of the gas emission. Positioning and tracking accuracy was better than below ±2 nm. The structural design is discussed in terms of the application to a high-speed high-precision stage system which has stable response to frequent biases without interference from resonant phenomena and the required mechanical strength.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 44 (5A), 3307-3312, 2005
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206263910912
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- NII論文ID
- 10015707479
- 130004533983
- 210000057953
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 7311706
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
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- 使用不可