Synthesis and Mechanical Properties of Nano-Ceramics Multilayer Thin Films

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  • セラミックスナノ積層多層薄膜の合成と機械特性
  • セラミックス ナノ セキソウ タソウ ハクマク ノ ゴウセイ ト キカイ トクセイ

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Abstract

TiN/BN ceramics multilayer films were deposited on Si (100) substrates by ion beam sputtering (IBS) under various deposition conditions. The deposited multilayer films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), Knoop hardness, and Multi-Beam-Optical Sensor (MOS). Internal stress of the multilayer thin films were changed by the multilayer periods (λ). Maximum hardness and internal stress of the multilayer thin films were observed at λ= 1530 nm. The enhancement effect in hardness and internal stress may be presumed the strain generation due to lattice stress at the interface between alternate ceramic thin films.

Journal

  • Shinku

    Shinku 47 (3), 197-199, 2004

    The Vacuum Society of Japan

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