書誌事項
- タイトル別名
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- Synthesis and Mechanical Properties of Nano-Ceramics Multilayer Thin Films
- セラミックス ナノ セキソウ タソウ ハクマク ノ ゴウセイ ト キカイ トクセイ
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抄録
TiN/BN ceramics multilayer films were deposited on Si (100) substrates by ion beam sputtering (IBS) under various deposition conditions. The deposited multilayer films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), Knoop hardness, and Multi-Beam-Optical Sensor (MOS). Internal stress of the multilayer thin films were changed by the multilayer periods (λ). Maximum hardness and internal stress of the multilayer thin films were observed at λ= 1530 nm. The enhancement effect in hardness and internal stress may be presumed the strain generation due to lattice stress at the interface between alternate ceramic thin films.
収録刊行物
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- 真空
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真空 47 (3), 197-199, 2004
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282679039932032
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- NII論文ID
- 10012867137
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 6930022
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可