書誌事項
- タイトル別名
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- Generation of High-density Plasma by Microwaves Propagating Along Metal Surface
- キンゾクタイ ニ ソッテ デンパン スル マイクロハ ニ ヨル コウミツド プラズマ セイセイ
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We found high-density plasma generated by microwaves propagating along metal surface at a negative voltage against a grounded chamber. Magnetic probe measurement showed that 2.45-GHz microwaves propagated as surface waves that were guided by the interface between the high-density plasma and underdense region in ion sheath surrounding the metal surface. The same phenomenon was demonstrated to occur in a narrow metal tube 7.5 mm in inner diameter, where surface waves were considered to propagate along the interface between a high-density plasma column in the tube and underdense region in ion sheath formed along the inner wall of the tube.<br>
収録刊行物
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- 真空
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真空 49 (3), 183-185, 2006
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282679040411392
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- NII論文ID
- 10018133627
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 7931202
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可