書誌事項
- タイトル別名
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- Differential-pressure Seal Mechanism of Air-to-Air Type Continuous Ion Plating Apparatus.
- レンゾク イオン プレーティング ソウチ ノ サアツ キミツ キコウ
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説明
A new method of differential-pressure sealing of the air-to-air type (pilot line) continuous hollow cathode discharge (HCD) plasma coating line was developed. The characteristic features of the air-to-air type sealing apparatus include (1) coupled sealing structure consisting of a single guide roller and a seal attachment, (2) specially designed seal attachment structure for wrapping thin sheets around a guide roller, thereby enabling the accomplishment of a good differential-pressure seal, and (3) the six chambers made of the step-by-step differential-pressure seal stages.<BR>This continuous air-to-air line differential-pressure seal apparatus is considerably free from vibration and noise components due to the formation of a smooth seal on the steel sheet. It is possible to accomplish a stable high vacuum of 0.066 Pa for a long duration. In comparison to other typical differential-pressure seal apparatuses this apparatus exhibits the most superior sealing operation.
収録刊行物
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- 真空
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真空 41 (8), 703-708, 1998
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282679041880832
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- NII論文ID
- 10001960544
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 4558460
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可