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- Kumada Teruhiko
- Super-fine SR lithography Laboratory, Association of Super-advanced Electronics Technologies (ABET)
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- Sumitani Hiroaki
- Super-fine SR lithography Laboratory, Association of Super-advanced Electronics Technologies (ABET)
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- Matsui Yasuji
- Super-fine SR lithography Laboratory, Association of Super-advanced Electronics Technologies (ABET)
この論文をさがす
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 14 (4), 519-522, 2001
フォトポリマー学会
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詳細情報 詳細情報について
-
- CRID
- 1390282679301437824
-
- NII論文ID
- 130003406675
- 40005352074
-
- NII書誌ID
- AA11576862
-
- COI
- 1:CAS:528:DC%2BD3MXmt1Wntr8%3D
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 5833449
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- 本文言語コード
- en
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- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
