書誌事項
- タイトル別名
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- Strain Sensors and Pressure Sensors using Cr-N Thin Films for High Pressure Hydrogen Gas
- コウアツ スイソ ガス カンキョウヨウ Cr-N ハクマクヒズミ センサ オヨビ アツリョク センサ
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<p>The authors investigated the influence of hydrogen on Cr-N strain sensitive thin films, which have a gauge factor of about 14, to develop a high sensitive strain sensor for high pressure hydrogen gas. As a result, it was found that the thin film was not affected by hydrogen and the specimen of Cr-N thin film on Zirconia substrate showed a sensitive and linear output to the pressure. It was considered that the Cr-N thin films were able to be expected as not only high sensitive strain sensors but also diaphragm-less pressure sensors in high pressure hydrogen gas.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 138 (5), 178-184, 2018-05-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679438281984
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- NII論文ID
- 130006729882
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 029060437
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可